SR EN 60204-33:2012

Safety of machinery - Electrical equipment of machines -- Part 33: Requirements for semiconductor fabrication equipment

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

167.53

Status : Valid
Approval date : 1/31/2012
Number of pages : 260
ICS : 13.110 Safety of machinery,25.040.30 Industrial robots.Manipulatorrs,29.020 Electrical engineering in general
Technical Committee : 23 - Industrial -process measurement and control