SR EN ISO 14644-4:2002

Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2001)

Status : Withdrawn
Approval date : 12/9/2002
Publish date : 12/15/2003
Withdrawal date : 2/28/2023
Number of pages : 54
ICS : 13.040.30 Workplace atmospheres
Technical Committee : 106 - Cleanrooms

Relations with other standards: